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Company Profile and History

Company Profile

Name PARAM Corporation 
Established April 8th, 2010
Address

 Excel Bldg., 3F. 4-44-4 Dai-machi, Hachioji-shi, Tokyo 193-0931 Japan

Capital 44.5 million yen
President Hiroshi Yasuda
Business Description Development, manufacturing and consultant of ultra-high-speed electron beam lithography system and those elements technology study.
TEL  (+81) 42-629-9852
FAX  (+81) 42-629-9862
E-mail info@param.co.jp
No. of Employees 6

 

History

April 2010 PARAM was established in Saitama Prefecture Hasuda city.
PARAM’s capital is 15 million yen.
June 2010 PARAM moved 3-6-1 Azuma town, Akishima city, Tokyo.
January 2011 We developed Ozone supply.
January 2011 We invented the electron gun that used rhenium.
October 2011 We invented the ultra-high-speed exposure device by a programmable shaped beam system.
March 2012 We patented the column-charge-up-free technology.
May 2012 We made a presentation of multi-axis multi-beam at EIPBN2012.
June 2012 PARAM’s capital was increased to 29.5milion yen.
November 2012 We patented the lens with permanent magnet in japan.
November 2012 We posted "Multiaxis and multibeam technology for high throughput maskless E-beam lithography" to the "J. Vac. Sci. Technol. B 30(6), Nov/Dec 2012".
June 2013 We developed Ozone decomposer.
April 2014 We patented PSB electron beam lithography system in USA . USP8,878,143B2
December 2014  We developed Small lens with parmanent magnet.
January 2015 An article on the electron optical lens for semiconductor manufacturing was published in the Nikkan Kogyo Shimbun.
March 2015 We patented Rhenium Schottky electron gun in USA.  USP9,070,527B2
May 2015 We filed a patent for Small lens with parmanent magnet.
May 2015 We made a presentation of Small lens with parmanent magnet at EIPBN2015. 
March 2016 Discovery and development of phenomena relating to Super LaB₆.
June 2017 An article about Super LaB₆ was published in the Nikkan Kogyo Shimbun.
June 2017 PARAM’s capital was increased to 44.5milion yen.
October 2017 PARAM moved  Excel Bldg., 3F. 4-44-4 Dai-machi, Hachioji-shi, Tokyo

 

Main bank SEIBU SINKIN BANK
MUFG Bank, Ltd
Main client JEOL Ltd.

 

 

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