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Ozone decomposer

Ozone decomposer OZ-1000

We have developed a high-efficiency ozone decomposer “OZ-1000”.
We developed new material that can decompose ozone gas.
New material's performance is several times higher than conventional material zeolite.
So this ozone decomposer is smaller than other company's conventional ozone decomposer.
OZ-1000 has same conductance as conventional ozone decomposer.
Our ozone decomposer OZ-1000’s performance is higher more than conventional ozone decomposer.

 

OZ-1000

OZ-1000

OZ-1000L

OZ-1000L

  • The ozone decomposer is required in order to prevent the outflow of the high concentration ozone gas to downstream.
  • Ozone removal tool is required to prevent the vacuum pump corrosion by ozone gas. Especially the TMP's back-pressure pump has high pressure ozone gas. The ozone decomposer is essential .
  • Dust-rich material like an activated carbon cannot be used to guard the vacuum pump. We developed the ozone decomposer that does not use it.

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Ozone treatment capability evaluation of chemical material

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Ozone monitor A051020-SP61-01F(FIS)

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Evaluation the throughput of decomposing ozone by changing the depth of the chemical material (Cross-section is Φ134mm:140cm2)

  1. In the left view: Depth of quantity of a chemical material becomes the deeper, the leakage of the ozone undecomposed reduces even in a large flow rate. Chemical material depth of OZ-1000 is 60mm. Therefore ozone gas is decomposed to below 0.1ppm (TLV) at 5sccm.

  2. In the right view: If we assume that the inclination of the line in the evaluation value of the concentration of ozone gas (ppm / sccm), concentration inclination decreases almost exponentialy of depth of chemical material.

  3. If the depth the chemical material is 140mm, ozone gas of concentration 0.09ppm can be processed at the 100sccm.
    → Reflected in the OZ-1000L of chemical material depth 180mm (0.02ppm)

 

※Depth will shallow without notice by the technology progress .

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Providing two model depending on the application

OZ-1000

Standard model OZ-1000

①    100L / min or more of the large conductance

②    Corresponding to the flow rate of the 5sccm

OZ-1000L

Large flow rate corresponding model OZ-1000L

①    50L / min or more of the conductance

②    Corresponding to the large flow of 100sccm

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Standard model OZ-1000

 

Name Ozone decomposer for vacuum
Model OZ-1000
Function

Decompose and remove the ozone gas under reduced pressure.

Large conductance.
Specification Inlet ozone concentration 15%↓
Outlet ozone concentration 0.1ppm↓
The maximum processing flow 5sccm↓
Conductance 100L/min↑
Inlet and outlet ports NW40
Housing Material SUS304
Appearance Φ216mm×138mm
Weight 6.7Kg
Lifetime 10year(Ozone concentration 10%)

 

Ozone gas processing performance comparison with other companies

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Constitution

Name Standard Quantity
Vacuum for ozone decomposer OZ-1000 1
Center Ring NW40 2
Clamp NW40 2
Blank flange NW40 2
 

OZ-1000.jpg

Photograph

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Large flow rate corresponding model OZ-1000L

Name Ozone decomposer for vacuum
Model OZ-1000L
Function
Decompose and remove the ozone gas under reduced pressure.
Specification Inlet ozone concentration 15%↓
Outlet ozone concentration 0.1ppm↓
The maximum processing flow 100sccm↓
Conductance 50L/min↑
Inlet and outlet ports NW40
Housing Material SUS304
Appearance Φ139.8mm×299mm
Weight 6.5Kg
Lifetime 10year(Ozone concentration 10%)

 

Ozone gas processing performance comparison with other companies

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Constitution

Name Standard Quantity
Ozone decomposer for vacuum OZ-1000L 1
Center Ring NW40 2
Clamp NW40 2
Blank flange NW40 2

 

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Photograph

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Attention

  • How to store
      This ozone decomposer use hygroscopic material.Please cover the intake and exhaust port tightly with a blank flange.
  • How to install
     Please Ozone decomposer installed of vertical.The direction of flow of ozone gas is vertical too.
  • How to use
     Don’t impact. Used material may be broken.

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Contact

PARAM Corporation

 Excel Bldg., 3F. 4-44-4 Dai-machi, Hachioji-shi, Tokyo 193-0931 Japan

【Phone】  (+81) 42-629-9852
【Fax】  (+81) 42-629-9862

 

Mail

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