Ozone supply
Ozone supply for EB systems
Function and Features
• The particles is not generated.
• The high concentration ozone gas can be generated without nitrogen.
• Ozone gas of the very small quantity can be introduced into a vacuum chamber.
• For ozone cleaning is not necessary to stop the equipment during normal operation.
• This ozone supply is low noise. It can be installed in the vicinity of the EB equipment.
Ozone supply
Specification
Ozone concentration： 200g/m3
Ozone generation system： Silent discharge method
Supply Ozone rate： maximum 5.0sccm
Raw material gas： Cylinder oxygen、PSA oxygen
Raw material gas consumption： 50ml/min
Cooling method： Water-cooling
Ozone cleaning technology.
This technology can be used to SEM, EB exposure system and EB inspection system.
The high concentration ozone gas can be react with electron beam irradiation and decomposes contamination.
Ozone gas can reduce contamination and it is effective in the removal of the grown contamination.
EB irradiation to Mo aperture (Φ100μm)
Without ozone cleaning
With ozone cleaning
Ozone cleaning system diagram
Mechanism of ozone cleaning
With the cycle of ① ~ ④ . Ozone cleaning continue to remove contamination in vacuum.
①Electron beam are irradiated to the ozone molecules adsorbed on the surface of the object.
②Oxygen radical occurs molecule is decomposed by the electron irradiation energy.
③Oxygen radicals remove the contamination to react with the carbon and hydrogen in the contamination.
