Papers
Papers
Papers【１】： J. Vac. Sci. Technol. B, Vol. 30, No. 6, Nov/Dec 2012（PDF）
Papers【２】： NanotechJapan Bulletin Vol.6, No.5
「電子線直接描画の高スループット化実現のための多軸・多ビーム化技術」(japanese only)
Ultra-high-speed electron beam lithography technology and elemental technology development, manufacturing, and consulting
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