Home
>
Contents
>
Informations
>
Papers
Ultra-high-speed electron beam lithography technology and elemental technology development, manufacturing, and consulting
Ozone supply
Ozone decomposer
Electron beam column
Electron beam column control circuits
Multi-beam multi-column system
High brightness electron emitter
Small lens with permanent magnet
Introduction
Company Profile and History
Access
Papers
News & Topics
New technology
Papers
Papers
Papers【1】:
J. Vac. Sci. Technol. B, Vol. 30, No. 6, Nov/Dec 2012
(PDF)
Papers【2】:
NanotechJapan Bulletin Vol.6, No.5
「電子線直接描画の高スループット化実現のための多軸・多ビーム化技術」(japanese only)
Informations
Papers
New technology