Ultra-high-speed electron beam lithography technology and elemental technology development, manufacturing, and consulting
Ozone supply
Ozone decomposer
Electron beam column control circuits
Electron beam column
Multi-beam multi-column system
High brightness electron emitter
Small lens with permanent magnet
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Various electron beam
Various electron beam
Ozone supply
Click here for details
Ozone decomposer
Click here for details
Electron beam column control circuits
Click here for details
Electron beam column
Click here for details
Various electron beam
Ozone supply
Ozone decomposer
Electron beam column control circuits
Electron beam column
