Ultra-high-speed electron beam lithography technology and elemental technology development, manufacturing, and consulting
Ozone supply
Ozone decomposer
Electron beam column control circuits
Electron beam column
Multi-beam multi-column system
High brightness electron emitter
Small lens with permanent magnet
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High-speed electron beam lithography
High-speed electron beam lithography
Multi-beam multi-column system
Click here for details
High brightness electron emitter
Click here for details
Small lens with permanent magnet
Click here for details
High-speed electron beam lithography
Multi-beam multi-column system
High brightness electron emitter
Small lens with permanent magnet
