Company Profile
| Name | PARAM Corporation |
|---|---|
| Established | April 8th, 2010 |
| Address |
Excel Bldg., 3F. 4-44-4 Dai-machi, Hachioji-shi, Tokyo 193-0931 Japan |
| Capital | 44.5 million yen |
| President | Hiroshi Yasuda |
| Business Description | Development, manufacturing and consultant of ultra-high-speed electron beam lithography system and those elements technology study. |
| TEL | (+81) 42-629-9852 |
| FAX | (+81) 42-629-9862 |
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| No. of Employees | 5 |
History
| April 2010 | PARAM was established in Saitama Prefecture Hasuda city. PARAM’s capital is 15 million yen. |
|---|---|
| June 2010 | PARAM moved 3-6-1 Azuma town, Akishima city, Tokyo. |
| January 2011 | We developed Ozone supply. |
| January 2011 | We invented the electron gun that used rhenium. |
| October 2011 | We invented the ultra-high-speed exposure device by a programmable shaped beam system. |
| March 2012 | We patented the column-charge-up-free technology. |
| May 2012 | We made a presentation of multi-axis multi-beam at EIPBN2012. |
| June 2012 | PARAM’s capital was increased to 29.5milion yen. |
| November 2012 | We patented the lens with permanent magnet in japan. |
| November 2012 | We posted “Multiaxis and multibeam technology for high throughput maskless E-beam lithography” to the “J. Vac. Sci. Technol. B 30(6), Nov/Dec 2012”. |
| June 2013 | We developed Ozone decomposer. |
| April 2014 | We patented PSB electron beam lithography system in USA . USP8,878,143B2 |
| December 2014 | We developed Small lens with parmanent magnet. |
| January 2015 | An article on the electron optical lens for semiconductor manufacturing was published in the Nikkan Kogyo Shimbun. |
| March 2015 | We patented Rhenium Schottky electron gun in USA. USP9,070,527B2 |
| May 2015 | We filed a patent for Small lens with parmanent magnet. |
| May 2015 | We made a presentation of Small lens with parmanent magnet at EIPBN2015. |
| March 2016 | Discovery and development of phenomena relating to Super LaB₆. |
| June 2017 | An article about Super LaB₆ was published in the Nikkan Kogyo Shimbun. |
| June 2017 | PARAM’s capital was increased to 44.5milion yen. |
| October 2017 | PARAM moved Excel Bldg., 3F. 4-44-4 Dai-machi, Hachioji-shi, Tokyo |
| Main bank | SEIBU SINKIN BANK MUFG Bank, Ltd |
|---|---|
| Main client | JEOL Ltd. |
