Ozone decomposer

We have developed a high-efficiency ozone decomposer “OZ-1000”.
We developed new material that can decompose ozone gas.
New material's performance is several times higher than conventional material zeolite.
So this ozone decomposer is smaller than other company's conventional ozone decomposer.
OZ-1000 has same conductance as conventional ozone decomposer.
Our ozone decomposer OZ-1000’s performance is higher more than conventional ozone decomposer.

OZ-1000

OZ-1000L

• The ozone decomposer is required in order to prevent the outflow of the high concentration ozone gas to downstream.
• Ozone removal tool is required to prevent the vacuum pump corrosion by ozone gas. Especially the TMP's back-pressure pump has high pressure ozone gas. The ozone decomposer is essential .
• Dust-rich material like an activated carbon cannot be used to guard the vacuum pump. We developed the ozone decomposer that does not use it.

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Ozone monitor　A051020-SP61-01F（FIS)

 

Evaluation the throughput of decomposing ozone by changing the depth of the chemical material (Cross-section is Φ134mm：140cm2）

1. In the left view: Depth of quantity of a chemical material becomes the deeper, the leakage of the ozone undecomposed reduces even in a large flow rate. Chemical material depth of OZ-1000 is 60mm. Therefore ozone gas is decomposed to below 0.1ppm (TLV) at 5sccm.


2. In the right view: If we assume that the inclination of the line in the evaluation value of the concentration of ozone gas (ppm / sccm), concentration inclination decreases almost exponentialy of depth of chemical material.


3. If the depth the chemical material is 140mm, ozone gas of concentration 0.09ppm can be processed at the 100sccm.
   → Reflected in the OZ-1000L of chemical material depth 180mm (0.02ppm)

※Depth will shallow without notice by the technology progress .

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Standard model　OZ-1000

①    100L / min or more of the large conductance

②    Corresponding to the flow rate of the 5sccm

Large flow rate corresponding model　OZ-1000L

①    50L / min or more of the conductance

②    Corresponding to the large flow of 100sccm

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Ozone gas processing performance comparison with other companies

Constitution

Photograph

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Ozone gas processing performance comparison with other companies

Constitution

Photograph

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Attention

• How to store
  　 This ozone decomposer use hygroscopic material.Please cover the intake and exhaust port tightly with a blank flange.
• How to install
  　Please Ozone decomposer installed of vertical.The direction of flow of ozone gas is vertical too.
• How to use
  　Don’t impact. Used material may be broken.

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PARAM Corporation

 Excel Bldg., 3F. 4-44-4 Dai-machi, Hachioji-shi, Tokyo 193-0931 Japan

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