Multi-Axis-columns improve the throughput.
This is achieved by arranging the multiple electron optical system in a narrow range as much as possible.Small size and low power consumption electronic lens is essential in order to increase the number of the beam.PARAM is developing a permanent magnetic lens of small size and low power consumption.
Conventional electromagnetic lens（Diameter＞Φ100mm）
Small permanent magnet lens（The lens can be multiple arrangement.）
We made permanent magnet lens of contour 27mm experimentally. We evaluated the basic characteristics of this prototype lens using the SEM. We placed a prototype lens to underneath the objective lens of SEM in order to observe the convergence beam. We confirmed the convergence operation of the lens.
SEM(JEOL:JSM-5310LV)
We got the SEM image that is passed through the electron beam of the SEM to the permanent magnet lens. This was the almost same as the SEM image obtained without passing through the electron beam to the permanent magnet lens.
From this fact, the convergence effect and the reduction rate has been confirmed that it matches the simulation and in addition, permanent magnet lens is low aberration
※The difference of the S / N of the SEM image of the above is due to the viewing angle to the detector.
