Ultra-high-speed electron beam lithography technology and elemental technology development, manufacturing, and consulting
Ozone supply
Ozone decomposer
Electron beam column control circuits
Electron beam column
Multi-beam multi-column system
High brightness electron emitter
Small lens with permanent magnet
Introduction
Company Profile and History
Access
Recruit
Information
Papers
New technology
Home
Informations
Papers
Papers
Papers
Papers【１】：
J. Vac. Sci. Technol. B, Vol. 30, No. 6, Nov/Dec 2012
（PDF）
Informations
Papers
New technology
